Title :
A Piezoelectric pseudo-static Actuator For Large Displacement Under AC Voltage Operation
Author :
Toshiyoshi, Hiroshi ; Kobayashi, Dai ; Fujita, Hiroyuki ; Ueda, Toshitsugu
Author_Institution :
The University of Tokyo
Keywords :
Anisotropic magnetoresistance; Electrodes; Etching; Microactuators; Piezoelectric actuators; Resonance; Scanning electron microscopy; Shape; Suspensions; Voltage;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717214
