Title :
Fabrication And Characterization Of PZT Thin Films For Micromotors
Author :
Muralt, Paul ; Kholkin, Andrei ; Kohli, Markus ; Maeder, Thomas ; Brooks, Keith G. ; Luthier, R. ; Setter, N.
Author_Institution :
Ecole Politechnique Federale
Keywords :
Biomembranes; Degradation; Electrodes; Fabrication; Micromotors; Piezoelectric films; Silicon; Stators; Testing; Transistors;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717217
