DocumentCode

329215

Title

Fabrication Of An Electrostatic Microactuator With An S-shaped Film

Author

Shikida, Mitsuhiro ; Sato, Kazuo ; Harada, Takeshi

Author_Institution

Nagoya University

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

426

Lastpage

429

Keywords

Actuators; Electrodes; Electrostatics; Fabrication; Gases; Insulation; Microactuators; Microvalves; Prototypes; Valves;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717228

Filename

717228