Title :
Electrostatically Excited Diaphragm Driven As A Loudspeaker
Author :
Rangsten, P. ; Smith, L. ; Rosengren, L. ; Hok, B.
Author_Institution :
Uppsala University
Keywords :
Biomembranes; Bonding; Electrostatic actuators; Hermetic seals; Impedance matching; Loudspeakers; Resonance; Silicon; Ultrasonic transducers; Voltage;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717230
