Title :
Batch Fabrication Of Mechanical Platforms For High Density
Author :
Fan, L.-S. ; Woodman, S.
Author_Institution :
IBM Research Division
Keywords :
Actuators; CD recording; Disk drives; Fabrication; Memory; Micromechanical devices; Nonhomogeneous media; Rotors; Springs; Torque;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717231
