• DocumentCode
    329218
  • Title

    Capacitance Based Tunable Micromechanical Resonators

  • Author

    Adams, Scott G. ; Bertsch, Fred M. ; Shaw, Kevin A. ; Hartwell, Peter G. ; MacDonald, Noel C. ; Moon, Francis C.

  • Author_Institution
    Cornell University
  • Volume
    1
  • fYear
    1995
  • fDate
    25-29 Jun 1995
  • Firstpage
    438
  • Lastpage
    441
  • Keywords
    Capacitance; Electrodes; Electrostatic actuators; Equations; Laser tuning; Mechanical systems; Micromechanical devices; Oscillators; Resonance; Resonant frequency;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
  • Print_ISBN
    91-630-3473-5
  • Type

    conf

  • DOI
    10.1109/SENSOR.1995.717233
  • Filename
    717233
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=329218