Title :
A Microsensor With Integrated Heat Sink And Flow Guide For Gas Flow Sensing Applications
Author :
Qiu, Li ; Obermeier, Ernst ; Schubert, Axel
Author_Institution :
Technical University of Berlin
Keywords :
Etching; Fluid flow; Fluid flow measurement; Heat sinks; Microsensors; Resistors; Temperature distribution; Temperature sensors; Thermal sensors; Velocity measurement;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717272
