Title :
The spl mu/-Flown- A Novel Device Measuring Acoustical Flows
Author :
De Bree, Hans-Elias ; Leussink, Peter ; Korthorst, Twan ; Jansen, Henri ; Lammerink, Theo ; Elwenspoek, Miko
Author_Institution :
University of Twente
Keywords :
Acoustic devices; Acoustic measurements; Acoustic propagation; Acoustic sensors; Acoustic waves; Bridges; Frequency; Resistors; Surface impedance; Thermal sensors;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717278
