DocumentCode
329247
Title
Silicon Fusion Bonding and Deep Reactive Ion Etching a New Technology for Microstructures
Author
Klaassen, Erno H. ; Petersen, Kurt ; Noworolski, J.M. ; Logan, John ; Maluf, Nadim I. ; Brown, Joe ; Storment, Christopher ; McCullcy, W. ; Kovacs, Gregory T A
Author_Institution
Stanford University
Volume
1
fYear
1995
fDate
25-29 Jun 1995
Firstpage
556
Lastpage
559
Keywords
Anisotropic magnetoresistance; Bonding; Etching; Micromachining; Micromechanical devices; Microstructure; Resists; Silicon; Substrates; Surface impedance;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.717285
Filename
717285
Link To Document