Title :
The Black Silicon Method V: A Study Of The Fabricating Of Movable Structures For Micro Electromechanical Systems
Author :
De Boer, Meint ; Jansen, Henri ; Elwenspoek, Miko
Author_Institution :
University of Twente
Keywords :
Dry etching; Electromechanical systems; Hafnium; Micromechanical devices; Plasma applications; Plasma immersion ion implantation; Plasma temperature; Resists; Silicon on insulator technology; Wet etching;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717287
