Title :
High Resolution Shadow Mask Patterning In Deep Holes And Its Application To An Electrical Wafer Feed-through
Author :
Burger, G.J. ; Smulders, E.J.T. ; Berenschot, J.W. ; Lammerink, T.S.J. ; Fluitman, J.H.J. ; Imai, S.
Author_Institution :
University of Twente
Keywords :
Atomic layer deposition; Atomic measurements; Feeds; Laboratories; Mechanical engineering; Micromachining; Parasitic capacitance; Resists; Scattering; Substrates;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717289
