Title :
The Formation Of Electroplating Molds By Reactive Ion Etching
Author :
Chang, Shih-Chia ; Putty, Michael W. ; Hicks, David B.
Author_Institution :
General Motors Research and Development Center
Keywords :
Aluminum; Chromium; Etching; Gold; Heat treatment; Micromotors; Microsensors; Nickel; Polymers; Resists;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717290
