DocumentCode :
329254
Title :
Novel Process For A Monolithic Integrated Accelerometer
Author :
Offenberg, M. ; Larmer, F. ; Elsner, B. ; Munzel, H. ; Riethmuller, W.
Author_Institution :
R. Bosch GmbH, Automotive Equip. Div.
Volume :
1
fYear :
1995
fDate :
25-29 Jun 1995
Firstpage :
589
Lastpage :
592
Keywords :
Accelerometers; Annealing; BiCMOS integrated circuits; Capacitive sensors; Fabrication; Integrated circuit technology; Sensor phenomena and characterization; Surface topography; Temperature sensors; Thermal stresses;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
Type :
conf
DOI :
10.1109/SENSOR.1995.717293
Filename :
717293
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=329254
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