Title :
Surface Micromachined Capacitive Differential Pressure Sensor With Lithographically-defined Silicon Diaphragm
Author :
Mastrangelo, C.H. ; Zhang, X. ; Tang, W.C.
Author_Institution :
University of Michigan
Keywords :
Capacitive sensors; Capacitors; Electrodes; Error correction; Etching; Gas detectors; Sensor phenomena and characterization; Silicon; Temperature sensors; Transducers;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717299
