DocumentCode :
329260
Title :
Capacitive Silicon Differential Pressure Sensor
Author :
Hermann, J. ; Bourgeois, C. ; Porret, F. ; Kloeck, B.
Author_Institution :
CSEM Centre Suisse d´´Electronique et de Microtechnique
Volume :
1
fYear :
1995
fDate :
25-29 Jun 1995
Firstpage :
620
Lastpage :
623
Keywords :
Application specific integrated circuits; Biomembranes; Capacitive sensors; Frequency; Mechanical sensors; Oscillators; Piezoresistance; Sensor systems; Silicon; Vibrations;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
Type :
conf
DOI :
10.1109/SENSOR.1995.717304
Filename :
717304
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=329260
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