Title :
Lateral Force Measurements In A Scanning Force Microscope With Piezoresistive Sensors
Author :
Brugger, J. ; Burger, J. ; Binggeli, M. ; Imura, R. ; de Rooij, N.F.
Author_Institution :
University of Neuchatel
Keywords :
Force measurement; Force sensors; Microscopy; Piezoresistance; Piezoresistive devices; Silicon; Solid state circuits; Springs; Stress; Transducers;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717310
