DocumentCode

329265

Title

Microelectromechanical Scanning Tunneling Microscope

Author

Xu, Yang ; Miller, Scott A. ; MacDonald, Noel C.

Author_Institution

Cornell University

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

640

Lastpage

643

Keywords

Actuators; Atomic force microscopy; Atomic measurements; Conductors; Fabrication; Instruments; Probes; Semiconductor device measurement; Silicon; Tunneling;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717311

Filename

717311