Title :
A Micromachined Sub-micrometer Photodiode For Scanning Probe Microscopy
Author :
Davis, R.C. ; Williams, C.C. ; Neuzil, P.
Author_Institution :
University of Utah
Keywords :
Etching; Optical microscopy; Optical recording; Optical sensors; Optical surface waves; Photodiodes; Resists; Scanning probe microscopy; Silicon; Spatial resolution;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717318
