Title :
Effect of Au buffer on the field emission characteristics of chemical vapor deposited diamond films
Author :
Lee, J.S. ; Liu, K.S. ; Chuang, F.Y. ; Sun, C.Y. ; Huang, C.M. ; Lin, I.N.
Author_Institution :
Dept. of Mater. Sci. & Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
Abstract :
Au-precoating on silicon substrate was observed to enhance the field emission characteristics of diamond films deposited by chemical vapor deposition technique. The emission current density increased substantially from 1 μA/cm2 to 100 μA/cm2, while the turn on voltage decreased moderately from 14 MV/m to 10 MV/m. Raman spectra and electron diffraction in transmission electron microscopy (TEM) revealed that both diamond films deposited on Si or Au-coated Si (Au/Si) were nanosized crystals. The Au species were assumed to diffuse along grain boundaries, resulting in low resistance diamond films. Abundant supply of electrons via conducting grain boundaries was presumably the mechanism that enhanced the field emission of the diamond films grown on Au/Si substrates
Keywords :
CVD coatings; Raman spectra; diamond; electron diffraction; electron field emission; gold; grain boundary diffusion; nanostructured materials; transmission electron microscopy; Au-Si; C; Raman spectra; buffer; chemical vapor deposition; current density; diamond film; electron diffraction; field emission; gold precoating; grain boundary diffusion; nanosized crystals; resistance; silicon substrate; transmission electron microscopy; turn on voltage; Chemical vapor deposition; Current density; Diffraction; Electron emission; Gold; Grain boundaries; Semiconductor films; Silicon; Transmission electron microscopy; Voltage;
Conference_Titel :
Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International
Conference_Location :
St. Petersburg
Print_ISBN :
0-7803-3594-5
DOI :
10.1109/IVMC.1996.601815
