• DocumentCode
    3292759
  • Title

    Message from ISSM 2006 Executive Committee Chair

  • Author

    Inoue, Michihiro

  • Author_Institution
    Chairman of ISSM Executive Committee, Executive Engineer, Semiconductor Company, Matsushita Electric Industrial Co., Ltd.
  • fYear
    2006
  • fDate
    25-27 Sept. 2006
  • Abstract
    Presents the welcome message from the conference proceedings.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing, 2006. ISSM 2006. IEEE International Symposium on
  • Conference_Location
    Tokyo
  • ISSN
    1523-553X
  • Print_ISBN
    978-4-9904138-0-4
  • Type

    conf

  • DOI
    10.1109/ISSM.2006.4492992
  • Filename
    4492992