DocumentCode :
3292789
Title :
Initial stages of Eu and Yb silicides films growth on Si(111) surfaces
Author :
Krachino, T.V. ; Kuz´min, M.V. ; Loginov, M.V. ; Mittsev, M.A.
Author_Institution :
A.F. Ioffe Physicotech. Inst., Acad. of Sci., St. Petersburg, Russia
fYear :
1996
fDate :
7-12 Jul 1996
Firstpage :
250
Lastpage :
251
Abstract :
The initial stages of Yb and Eu silicides films growth on the Si(111) surface have been investigated. Their growth is shown to occur in accordance with the mechanism similar to Stranski-Krastanov mode. The growth of 3D silicides begins at elevated substrate temperature after the formation of monatomic thickness adsorbed layer is completed. The growing adsorbed layer, in the Yb case, reveals the domain structure. The desorption activation energies and surface silicides decomposition energies have been measured. The temperature limits of Eu and Yb silicides thermal stability has been found
Keywords :
adsorbed layers; desorption; elemental semiconductors; europium compounds; metallic thin films; silicon; thermal stability; ytterbium compounds; 3D growth; EuSi; Si; Si(111) surface; Stranski-Krastanov mode; YbSi; adsorbed layer; decomposition energy; desorption activation energy; domain structure; silicide film; substrate temperature; thermal stability; Atomic layer deposition; Bonding; Crystallization; Electrons; Kinetic theory; Microelectronics; Silicides; Spectroscopy; Temperature; Thermal stability;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International
Conference_Location :
St. Petersburg
Print_ISBN :
0-7803-3594-5
Type :
conf
DOI :
10.1109/IVMC.1996.601818
Filename :
601818
Link To Document :
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