Title :
Influence Of The Interaction Between Molecules On The Response Of A Metal-oxide-silicon Carbide, Mosic, Sensor
Author :
Baranzahi, Amir ; Spetz, Anita Lloyd ; Johansson, Reine ; Hamrefors, Gunnilla ; Lundstrom, Ingemar
Author_Institution :
Linkoping Institute of Technology
Keywords :
Argon; Atomic layer deposition; Capacitance; Capacitance-voltage characteristics; Gas detectors; Hydrocarbons; Hydrogen; Metal-insulator structures; Temperature sensors; Voltage;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717333
