DocumentCode
329283
Title
Influence Of The Interaction Between Molecules On The Response Of A Metal-oxide-silicon Carbide, Mosic, Sensor
Author
Baranzahi, Amir ; Spetz, Anita Lloyd ; Johansson, Reine ; Hamrefors, Gunnilla ; Lundstrom, Ingemar
Author_Institution
Linkoping Institute of Technology
Volume
1
fYear
1995
fDate
25-29 Jun 1995
Firstpage
722
Lastpage
725
Keywords
Argon; Atomic layer deposition; Capacitance; Capacitance-voltage characteristics; Gas detectors; Hydrocarbons; Hydrogen; Metal-insulator structures; Temperature sensors; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.717333
Filename
717333
Link To Document