Title :
In Situ Modification Of The NOx And CO Sensitivity Of Thin Pt-gate MOSFET´s
Author :
Zubkans, J. ; Spetz, A. Lloyd ; Sundgren, H. ; Winquist, F. ; Kleperis, J. ; Lusis, A. ; Lundstrom, I.
Author_Institution :
Linkoping Institute of Technology
Keywords :
Argon; Gas detectors; Gases; Hydrogen; MOSFET circuits; Physics; Polarization; Semiconductor films; Solid state circuits; Threshold voltage;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717334
