Micromachining Chemical And Biochemical Analysis And Reaction Systems On Glass Substrates

Author

Harrison, Daniel J. ; Fluri, Karl ; Chiem, Nghia ; Tang, Thompson ; Fan, Zhonghui

Author_Institution

University of Alberta

Volume

fYear

1995

fDate

25-29 Jun 1995

Firstpage

752

Lastpage

755

Keywords

Biochemical analysis; Chemical analysis; Fluid flow; Fluorescence; Glass; Micromachining; Performance analysis; Pumps; Reservoirs; Valves;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

DOI

10.1109/SENSOR.1995.717341

Filename

717341

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