Title :
Micromachining Chemical And Biochemical Analysis And Reaction Systems On Glass Substrates
Author :
Harrison, Daniel J. ; Fluri, Karl ; Chiem, Nghia ; Tang, Thompson ; Fan, Zhonghui
Author_Institution :
University of Alberta
Keywords :
Biochemical analysis; Chemical analysis; Fluid flow; Fluorescence; Glass; Micromachining; Performance analysis; Pumps; Reservoirs; Valves;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717341
