• DocumentCode
    3292920
  • Title

    Field emission characteristics of amorphous carbon and diamond emitters

  • Author

    Shim, J.Y. ; Chi, E.J. ; Baik, H.K.

  • Author_Institution
    Dept. of Metall. Eng., Yonsei Univ., Seoul, South Korea
  • fYear
    1996
  • fDate
    7-12 Jul 1996
  • Firstpage
    293
  • Lastpage
    297
  • Abstract
    Amorphous carbon and diamond coated emitters have been used to examine field emission characteristics. Amorphous carbon is coated by a new process named helical resonator plasma enhanced chemical vapor deposition. An amorphous carbon emitter with broad disordered graphite peak and small wavenumber of graphite exhibits a better I-V characteristic than that with an intense disordered graphite peak and large wavenumber of graphite. Field emission from diamond coated emitters shows enhancement both in turn-on voltage and total emission current. Diamond coated emitters have a considerable amount of graphite which may allow continuous low field emission. We think that negative electron affinity and graphite inclusions seem to improve the field emission characteristics. However, further work is necessary to exactly clarify the mechanism for low field emission
  • Keywords
    amorphous state; carbon; diamond; electron affinity; electron field emission; inclusions; plasma CVD coatings; vacuum microelectronics; C; I-V characteristic; amorphous C emitters; chemical vapor deposition; coated emitters; continuous low field emission; diamond emitters; emission current; field emission characteristics; graphite inclusions; helical resonator PECVD; negative electron affinity; plasma enhanced CVD; turn-on voltage; Amorphous materials; Carbon dioxide; Chemicals; Diamond-like carbon; Electron emission; Plasma chemistry; Plasma properties; Semiconductor films; Substrates; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International
  • Conference_Location
    St. Petersburg
  • Print_ISBN
    0-7803-3594-5
  • Type

    conf

  • DOI
    10.1109/IVMC.1996.601827
  • Filename
    601827