Title :
Sensor Controlled Processes In Chemical Microreactors
Author :
Mobius, H. ; Ehrfeld, W. ; Hessel, V. ; Richter, Thomas
Author_Institution :
IMM Institut fur Mikrotechnik GmbH
Keywords :
Chemical processes; Chemical sensors; Costs; Glass; Optical device fabrication; Optical materials; Optical sensors; Polymers; Process control; Production;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717347
