Title :
Thermal Analysis And Design Of A Micro-hotplate For Integrated Gas Sensor Applications
Author :
Fung, Samuel K H ; Tang, Zhenan ; Chan, Philip C.H. ; Sin, Johnny K O ; Cheung, Peter W.
Author_Institution :
Hong Kong University of Science and Technology
Keywords :
Application software; Finite element methods; Gas detectors; Heat sinks; Heating; Packaging; Temperature distribution; Temperature sensors; Thermal sensors; Visualization;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717358
