Title :
Selected-area Deposition Of Multiple Active Films For Conductometric Microsensor Arrays
Author :
Semancik, S. ; Cavicchi, R.E. ; Kreider, K.G. ; Suehle, J.S. ; Chaparala, P.
Author_Institution :
National Institute of Standards and Technology
Keywords :
Chemical sensors; Chemical technology; Conductive films; Gas detectors; Laboratories; Microsensors; Semiconductivity; Semiconductor films; Sensor arrays; Temperature sensors;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717361
