Author :
Motegi, R. ; Okajima, H. ; Ohuchi, Hidetoshi ; Guan, N.
Author_Institution :
Tokimec Inc., Tokyo, Japan
Abstract :
A surface acoustic wave (SAW) inclinometer improved by a new design technique is presented. Key devices of the SAW inclinometer with a quartz cantilever are the double-sided SAW resonators. The difference in turnover temperatures between two SAW resonators causes a temperature effect. The shift in turnover temperature is studied theoretically, and it is found that it mainly depends on the distance between reflectors. This optimum distance is determined. As a result, the temperature dependence of the SAW inclinometer is drastically reduced. The deviation from the least squares parabolic fit to temperature dependence is reduced to less than 30 s. Furthermore, resolution and nonlinearity of the inclinometer are close to 10 s because of its high-Q resonator
Keywords :
surface acoustic wave devices; SAW inclinometer; SiO2; high-Q resonator; quartz cantilever; temperature dependence; Accelerometers; Acoustic sensors; Acoustic waves; Copper; Least squares approximation; Least squares methods; Resonant frequency; Surface acoustic waves; Temperature dependence; Temperature sensors;
Conference_Titel :
Ultrasonics Symposium, 1991. Proceedings., IEEE 1991
Conference_Location :
Orlando, FL
DOI :
10.1109/ULTSYM.1991.234180
