Title :
A novel low-voltage ballistic-electron-emission source
Author :
Hagen, C.W. ; van Bakel, G.P.E.M. ; Borgonjen, E.G. ; Kruit, P. ; Kazmiruk, V.V. ; Kudryashov, V.A.
Author_Institution :
Dept. of Appl. Phys., Delft Univ. of Technol., Netherlands
Abstract :
A novel tunnel junction emitter based on ballistic electron transmission through ultra-thin metal foils is proposed as an electron source. From a simple planar tunneling model and Monte-Carlo simulations, we show that either a high-brightness monochromatic electron source can be obtained or a high-current source with energy spread comparable with a field emission source. Freestanding 5 nm thick Pt films were successfully fabricated for the construction of a tunnel junction electron source, in which a UHV-STM is used as a tip-emitter positioning device
Keywords :
Monte Carlo methods; electron emission; electron guns; electron sources; platinum; tunnelling; vacuum microelectronics; 5 nm; LV ballistic-electron-emission source; Monte-Carlo simulations; Pt; Pt films; UHV-STM; ballistic electron transmission; electron microscopy; high-brightness monochromatic source; high-current source; lithography; low-voltage electron source; planar tunneling model; tip-emitter positioning device; tunnel junction emitter; ultra-thin metal foils; Electron beams; Electron emission; Electron guns; Electron microscopy; Electron sources; Gold; Materials science and technology; Microelectronics; Structural beams; Tunneling;
Conference_Titel :
Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International
Conference_Location :
St. Petersburg
Print_ISBN :
0-7803-3594-5
DOI :
10.1109/IVMC.1996.601841
