DocumentCode
329323
Title
Mems: What Lies Ahead?
Author
Petersen, Kurt
Author_Institution
Stanford University
Volume
1
fYear
1995
fDate
25-29 Jun 1995
Firstpage
894
Lastpage
897
Keywords
Actuators; Automotive engineering; Commercialization; History; Investments; Micromechanical devices; Production; Research and development; Solid state circuits; Vehicle dynamics;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.717377
Filename
717377
Link To Document