Title :
Risk Based Capacity Planning Method for Semiconductor Fab with Queue Time Constraints
Author :
Ono, Akira ; Kitamura, Shoichi ; Mori, Kazuyuki
Author_Institution :
Renesas Technol. Corp., Itami
Abstract :
It is difficult to plan capacities of a semiconductor wafer fabrication with constraints of queue time which means a waiting time from the end of a step to the start of the next step for warranting production quality. If the queue time constraints could not be kept, the product is scrapped or reprocessed for qualitative recovery, and production efficiency remarkably decreases. This paper proposes an evaluation method which enables capacity planning of a fab with the queue time constraints, and shows its validity by simulation experiments. Furthermore we present an effectiveness of the method by applying to actual production lines.
Keywords :
capacity planning (manufacturing); integrated circuit manufacture; quality management; scheduling; production efficiency; production lines; production quality; queue time constraints; risk based capacity planning method; semiconductor wafer fabrication; Capacity planning; Fabrication; Investments; Manufacturing; Production facilities; Risk management; Semiconductor device manufacture; Tellurium; Time factors; Upper bound;
Conference_Titel :
Semiconductor Manufacturing, 2006. ISSM 2006. IEEE International Symposium on
Conference_Location :
Tokyo
Print_ISBN :
978-4-9904138-0-4
DOI :
10.1109/ISSM.2006.4493020
