A Dynamic Method for Optimal WIP Allocation and Control in a Semiconductor Manufacturing System

Author

Liu, Chih-Ming ; Kuo, Chung-Jen ; Chi, Chih-Yang

Author_Institution

Nat. Tsing Hua Univ., Hsinchu

fYear

2006

fDate

25-27 Sept. 2006

Firstpage

61

Lastpage

65

Abstract

The required total WIP level of the semiconductor manufacturing system is estimated by using neural networks, and then the total number of WIP is allocated to each workstation and operation by using the queuing model. The resulting WIP level for each operation is then used to control the manufacturing system. The simulation results show that the proposed method for allocating total WIP to each workstation and operation can reduce 16% of mean cycle time and not increase the variation of cycle time for the manufacturing system.

Keywords

neural nets; production engineering computing; queueing theory; semiconductor device manufacture; neural networks; optimal WIP allocation; queuing model; semiconductor manufacturing system; Analytical models; Control systems; Fabrication; Manufacturing systems; Neural networks; Optimal control; Semiconductor device manufacture; Semiconductor device modeling; Throughput; Workstations; WIP; cycle time; neural networks; queuing model;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing, 2006. ISSM 2006. IEEE International Symposium on

Conference_Location

Tokyo

ISSN

1523-553X

Print_ISBN

978-4-9904138-0-4

Type

conf

DOI

10.1109/ISSM.2006.4493023

Filename

4493023