DocumentCode :
3293319
Title :
Study of new novel FinFET device with its bodies been connected
Author :
Lin, Jyi-Tsong ; Lin, Po-Hsieh ; Eng, Yi-Chuen
Author_Institution :
Dept. of Electr. Eng., Nat. Sun Yat-Sen Univ., Kaohsiung
fYear :
2009
fDate :
18-20 March 2009
Firstpage :
333
Lastpage :
336
Abstract :
In this paper, novel FinFET device structures with its bodies been connected together have been for the first time proposed by three-dimensional (3-D) simulation. The short-channel characteristics of threshold voltage (VTH), drain induced barrier lowering (DIBL), and on-off ratio current performance have been examined and explained in this paper. Also, the novel structures show the desired characteristic performance when using different kind of wafer, such as bulk wafer and silicon on insulator (SOI) wafer. Our proposed devices can not only lower the VTH, but also reduce the leakage current due to its active body been connected. In addition, it can also help us to develop a new low cost fabrication technology for the future technology node.
Keywords :
MOSFET; leakage currents; semiconductor process modelling; FinFET device; Si; bulk wafer; drain induced barrier lowering; leakage current; on-off ratio current performance; short-channel characteristics; silicon-on-insulator wafer; three-dimensional simulation; threshold voltage; CMOS technology; Controllability; Electrons; FinFETs; Lattices; Leakage current; MOSFET circuits; Silicon on insulator technology; Temperature; Threshold voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultimate Integration of Silicon, 2009. ULIS 2009. 10th International Conference on
Conference_Location :
Aachen
Print_ISBN :
978-1-4244-3704-7
Type :
conf
DOI :
10.1109/ULIS.2009.4897603
Filename :
4897603
Link To Document :
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