DocumentCode
3293349
Title
FEM analysis of the reflection coefficient of SAWs in an infinite periodic array
Author
Buchner, Markus ; Ruile, Werner ; Dietz, Anselm ; Dill, Roland
Author_Institution
Siemens AG, Munich, Germany
fYear
1991
fDate
8-11 Dec 1991
Firstpage
371
Abstract
A finite element tool for the analysis of infinite gratings of interdigital transducers in surface acoustic wave (SAW) devices has been developed. The computation of one period of the infinite structure together with the application of periodical boundary conditions makes the analysis of the total geometry possible. The eigenfrequencies of such a structure in the sagittal plane are calculated, and parameters (velocity, reflection) for the simulation programs of complete SAW devices are derived from them. The dependence of these parameters on the electrode shape has been analyzed and is presented
Keywords
acoustic transducers; finite element analysis; surface acoustic wave devices; finite element tool; infinite periodic array; interdigital transducers; periodical boundary conditions; reflection coefficient; surface acoustic wave; Acoustic reflection; Acoustic transducers; Acoustic waves; Boundary conditions; Computational geometry; Finite element methods; Gratings; Sawing machines; Surface acoustic wave devices; Surface acoustic waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 1991. Proceedings., IEEE 1991
Conference_Location
Orlando, FL
Type
conf
DOI
10.1109/ULTSYM.1991.234189
Filename
234189
Link To Document