Title :
New results for the characterization of SAW sensitivity to mechanical stresses using finite element analysis
Author :
Ballandras, S. ; Bigler, E.
Author_Institution :
Lab. de Phys. et Metrologie des Oscillateurs, CNRS, Besancon, France
Abstract :
The anisotropy of quartz crystal is used in surface acoustic wave (SAW) devices to compensate for the influence of external perturbations (temperature or mechanical stress effects). Experimental results on the sensitivity of SAW quartz cuts to dynamical thermoelastic effects and to mechanical stress effects are studied in planar stress-compensated SAW quartz cuts. Theoretical predictions on the sensitivity to mechanical stresses (diametrical compression) are obtained either by analytical methods or by finite element analysis coupled to a perturbation method
Keywords :
finite element analysis; surface acoustic wave devices; thermoelasticity; SAW sensitivity; SiO2; analytical methods; anisotropy; characterization; diametrical compression; dynamical thermoelastic effects; external perturbations; finite element analysis; mechanical stresses; perturbation method; quartz crystal; temperature; ultra-stable oscillators; Anisotropic magnetoresistance; Finite element methods; Surface acoustic wave devices; Surface acoustic waves; Temperature dependence; Temperature distribution; Temperature sensors; Testing; Thermal stresses; Thermoelasticity;
Conference_Titel :
Ultrasonics Symposium, 1991. Proceedings., IEEE 1991
Conference_Location :
Orlando, FL
DOI :
10.1109/ULTSYM.1991.234200
