New results for the characterization of SAW sensitivity to mechanical stresses using finite element analysis

Author

Ballandras, S. ; Bigler, E.

Author_Institution

Lab. de Phys. et Metrologie des Oscillateurs, CNRS, Besancon, France

fYear

1991

fDate

8-11 Dec 1991

Firstpage

425

Abstract

The anisotropy of quartz crystal is used in surface acoustic wave (SAW) devices to compensate for the influence of external perturbations (temperature or mechanical stress effects). Experimental results on the sensitivity of SAW quartz cuts to dynamical thermoelastic effects and to mechanical stress effects are studied in planar stress-compensated SAW quartz cuts. Theoretical predictions on the sensitivity to mechanical stresses (diametrical compression) are obtained either by analytical methods or by finite element analysis coupled to a perturbation method

Keywords

finite element analysis; surface acoustic wave devices; thermoelasticity; SAW sensitivity; SiO₂; analytical methods; anisotropy; characterization; diametrical compression; dynamical thermoelastic effects; external perturbations; finite element analysis; mechanical stresses; perturbation method; quartz crystal; temperature; ultra-stable oscillators; Anisotropic magnetoresistance; Finite element methods; Surface acoustic wave devices; Surface acoustic waves; Temperature dependence; Temperature distribution; Temperature sensors; Testing; Thermal stresses; Thermoelasticity;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1991. Proceedings., IEEE 1991

Conference_Location

Orlando, FL

Type

conf

DOI

10.1109/ULTSYM.1991.234200

Filename

234200