Title :
Requirements for AMHS in 450 mm era
Author_Institution :
Asyst Shinko, Inc., Ise
Abstract :
When examining new configuration for manufacturing systems for 450 mm wafers, it is important to build logical models of whole or parts of fabs that include AMHS (automated material handling system), and then investigate behaviors of them. This paper presents a logical model of a part of a fab that includes production tools and AMHS. It shows CET (carrier exchange time) becomes more important for AMHS design in 450 mm fabs than in 300 mm fabs. It also implies that AMHS would be required to reduce variability of carrier delivery times.
Keywords :
manufacturing systems; materials handling; semiconductor device manufacture; AMHS; automated material handling system; carrier delivery times; carrier exchange time; logical models; manufacturing systems; production tools; size 450 mm; wafer fabs; Collision mitigation; Control systems; Manufacturing systems; Materials handling; Production; Road transportation; Semiconductor device modeling; Throughput; Time measurement;
Conference_Titel :
Semiconductor Manufacturing, 2006. ISSM 2006. IEEE International Symposium on
Conference_Location :
Tokyo
Print_ISBN :
978-4-9904138-0-4
DOI :
10.1109/ISSM.2006.4493057
