DocumentCode
3293826
Title
Improvement of performance for higher magnification thermal imaging
Author
Suzuki, Hiroyoshi ; Koshikawa, Kazushige ; Kuroda, Takahiko ; Ishizuka, Toshimichi ; Gyue, Fan Pin ; Yuan, Fang Pei ; Ji, Wang Jia
Author_Institution
Syst. Div., Hamamatsu Photonics K.K., Hamamatsu, Japan
fYear
2009
fDate
6-10 July 2009
Firstpage
489
Lastpage
492
Abstract
We have developed a 30times IR sensitive lens for thermal microscopy making it possible to observe thermal images under high magnification beyond 100times in combination with a solid immersion lens. And we could find that it possible to observe thermal images with high magnification beyond 100times and high resolution as less than 1 mum line and space.
Keywords
infrared imaging; solid immersion lens; thermal imaging; thermal microscopy; High-resolution imaging; Image resolution; Infrared detectors; Lenses; Microscopy; Optical imaging; Optical refraction; Optical sensors; Solids; Thermal lensing;
fLanguage
English
Publisher
ieee
Conference_Titel
Physical and Failure Analysis of Integrated Circuits, 2009. IPFA 2009. 16th IEEE International Symposium on the
Conference_Location
Suzhou, Jiangsu
ISSN
1946-1542
Print_ISBN
978-1-4244-3911-9
Electronic_ISBN
1946-1542
Type
conf
DOI
10.1109/IPFA.2009.5232602
Filename
5232602
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