DocumentCode
3293950
Title
In-situ observation and formation mechanism of aluminum voiding
Author
Sugano, Y. ; Minegishi, S. ; Sumi, H. ; Itabashi, M.
Author_Institution
Sony Corp., Atsugi, Japan
fYear
1988
fDate
12-14 Apr 1988
Firstpage
34
Lastpage
38
Abstract
An in situ observation equipment was used to investigate aluminum void formation. It was found that the voids are formed during heating and are hardly changed during cooling. The void growth can be described by an equation in which the total number of voids saturates to a certain value as a function of heating time. The passivation swelling as a causative mechanism was confirmed with an actual trace of the material´s surface and by a finite-element simulation
Keywords
aluminium; metallisation; passivation; reliability; voids (solid); Al; Al void formation; finite-element simulation; heating; in situ observation; interconnection; passivation swelling; void growth; Aluminum; Cooling; Equations; Finite element methods; Heating; Optical films; Optical microscopy; Optical recording; Passivation; Silicon compounds; Temperature; Thermal stresses;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium 1988. 26th Annual Proceedings., International
Conference_Location
Monterey, CA
Type
conf
DOI
10.1109/RELPHY.1988.23422
Filename
23422
Link To Document