Priority Behavior Modeling of Fab for Supply Chain Management

This paper develops modeling methods and fab behavior models with predictability and scalability to capture variability and manufacturing service differentiation in semiconductor supply chain management. A novel, hybrid decomposition approximation-based priority queueing network model is designed for fab behavior modeling. The model characterizes the relationship between output performance metrics of cycle time, wafer-in-process, throughput, and capacity utilization and input factors of priority mix, wafer release, capacity allocation and machine characteristics. Model evaluation results over some fab models demonstrate that the hybrid decomposition approximation-based network model yields very quick and good quality estimations of mean and variability of tool group and fab performance metrics.