Title :
Study of the relation between Loading ratio and X-Factor
Author :
Tsuruta, Satoru ; Kabata, Kazuo ; Kawakami, Hiroyuki ; Kishimura, Michifumi ; Yamaguchi, Shinsuke ; Ogawa, Tadahiro
Author_Institution :
NEC Electron. Inc., Sagamihara
Abstract :
In the semiconductor FAB, Lead-Time of a product is required to be decrease as much as possible for customer demands. Investigation of an influence parameter about X- Factor of a product is needed to discuss how Lead-Time shortens. The own simulation calculated X-Factor when a type and a parameter of equipment is changed. By this simulation, X- Factor by each process depended on loading ratio of equipment, and it became clear that it in particular was affected by a fluctuation of Down-time greatly. On the other hand as for X-Factor is not almost influenced the fluctuation of Up-time and length of processing time.
Keywords :
customer satisfaction; semiconductor device manufacture; X-Factor; customer demands; loading ratio; semiconductor FAB; Costs; Fluctuations; Lead compounds; National electric code; Production; Productivity;
Conference_Titel :
Semiconductor Manufacturing, 2006. ISSM 2006. IEEE International Symposium on
Conference_Location :
Tokyo
Print_ISBN :
978-4-9904138-0-4
DOI :
10.1109/ISSM.2006.4493088
