Title :
Nano-thickness Stellar Defects
Author :
Moriya, Tsuyoshi ; Yamawaku, Jun ; Ryu, Yoshitaka ; Nagaike, Hiroshi ; Yakushiji, Hideaki
Author_Institution :
Tokyo Electron AT Ltd., Nirasaki
Abstract :
New type defects which are nanometer-thickness stellar shape defects called as the stellar defects are reported. Since the stellar defects need the center particle and the water to form, we successfully have reduced the stellar defects by reducing the particles and humidity in the chamber. These very thin defects must be key issues in the processes that we have to control nanometer thickness.
Keywords :
nanotechnology; semiconductor technology; center particle; nanothickness stellar defects; stellar shape defects; Crystallization; Electrons; Humidity; Large scale integration; Plasma applications; Plasma materials processing; Plasma measurements; Refrigeration; Shape; Silicon;
Conference_Titel :
Semiconductor Manufacturing, 2006. ISSM 2006. IEEE International Symposium on
Conference_Location :
Tokyo
Print_ISBN :
978-4-9904138-0-4
DOI :
10.1109/ISSM.2006.4493092
