Ultrasonic motor utilizing elastic fin rotor

A new ultrasonic micromotor, which consists of an ultrasonic vibrator and a rotor with elastic fins, is proposed. The fins convert the ultrasonic vibration into the driving force. A motor, 5 mm in diameter, was fabricated and worked quite well, and its characteristics were also measured. To estimate the specifications of the motor, numerical analysis based on fundamental models of the elastic fin were successfully carried out. The simple structure of this motor suggests the possibility of further miniaturization of the motor