A wavelet-Galerkin method for the simulation of torsion MEMS devices under the effect of squeeze film damping

Author

Yongping, Song ; Pu, Li ; Rufu, Hu

Author_Institution

Sch. of Mech. Eng., Southeast Univ., Nanjing, China

fYear

2011

fDate

15-17 April 2011

Firstpage

5671

Lastpage

5674

Abstract

This paper presents a novel approach of wavelet Galerkin method applied in the squeeze film damping of a MEMS torsion mirror based on Daubechies wavelet. The general Reynolds equation is modified to a nonlinear equation. Then the damping pressure is expanded by Daubechies wavelet and the coefficient is solved by Galerkin method. The pressure distribution and the frequency response function of the damping are derived. Based on the presented method, an example of the torsion mirror is calculated and the results agree well with the Double sine series method, which have been verified by experiment and numerical calculation. The new method is an effective numerical method to solve the squeeze film air damping of a MEMS torsion mirror.

Keywords

Galerkin method; damping; frequency response; micromechanical devices; micromirrors; nonlinear equations; torsion; wavelet transforms; Daubechies wavelet; Double sine series method; MEMS torsion mirror; damping pressure; frequency response function; general Reynolds equation; nonlinear equation; pressure distribution; squeeze film air damping; torsion MEMS devices; wavelet-Galerkin method; Damping; Equations; Films; Frequency response; Mathematical model; Micromechanical devices; Mirrors; Daubechies wavelet; squeeze film air damping; torsion micro-mirror; wavelet-Galerkin method;

fLanguage

English

Publisher

ieee

Conference_Titel

Electric Information and Control Engineering (ICEICE), 2011 International Conference on

Conference_Location

Wuhan

Print_ISBN

978-1-4244-8036-4

Type

conf

DOI

10.1109/ICEICE.2011.5778387

Filename

5778387