A Systematical Method to Determine the Internal Pressure and Hermeticity of MEMS Packages

Author

Bo Wang ; De Coster, J. ; Simone, S. ; Wevers, M. ; De Wolf, Ingrid

Author_Institution

Dept. of Metall. & Mater. Eng., Katholieke Univ. Leuven, Leuven, Belgium

Volume

23

Issue

4

fYear

2014

fDate

Aug. 2014

Firstpage

862

Lastpage

870

Abstract

Several classes of microelectromechanical systems are sensitive to pressure and need hermetic packages to keep the internal pressure constant over their lifetime. From a functionality and reliability point of view, knowing the internal pressure and its stability over time, i.e., the hermeticity of the package, is important. This paper demonstrates a new systematical method to measure the internal pressure of the package and, in addition, its leakage rate. It is based on an innovative use of the focused ion beam together with a measurement of pressure sensitive parameters.

Keywords

electronics packaging; focused ion beam technology; hermetic seals; micromechanical resonators; pressure measurement; MEMS packages hermeticity; MEMS packages internal pressure measurement; focused ion beam; leakage rate; microelectromechanical systems; pressure sensitive parameter measurement; resonance frequency; systematical method; time stability; Capacitance; Capacitance measurement; Electrodes; Micromechanical devices; Pressure measurement; Sensitivity; Temperature measurement; MEMS package; hermeticity; hermeticity.; internal pressure; leakage rate;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2014.2307391

Filename

6766664