Title :
A New Air Cleaning and Cooling Instrument Using Oblique Honeycomb
Author :
Minobe, S. ; Terada, I. ; Motoyoshi, Y. ; Hanaoka, H. ; Shirai, Y. ; Ohmi, T.
Author_Institution :
Nichias Corp., Tokyo
Abstract :
A new instrument with unified functions of washing and cooling for the intake air to clean rooms was studied. Its structure is based on oblique honeycombs made of high purity alumina as contact media of air to water. The alumina medium releases less contaminant to pure water than the conventional. The instrument showed high efficiencies in air cooling as well as removal of inorganic chemicals in the air. These resulted in the shortening of their lengths, reducing the amount of recycling water and consequently lowering the pressure loss upon the air treatment. The new instrument can provide very clean environments with low operation costs.
Keywords :
clean rooms; clean rooms; recycling water; Air cleaners; Coils; Cooling; Costs; Counting circuits; Inorganic chemicals; Instruments; Mechanical factors; Recycling; Water conservation;
Conference_Titel :
Semiconductor Manufacturing, 2006. ISSM 2006. IEEE International Symposium on
Conference_Location :
Tokyo
Print_ISBN :
978-4-9904138-0-4
DOI :
10.1109/ISSM.2006.4493124
