Title :
New QCM Sensor for Real-time AMC Detection in SMIF Pods
Author :
Takasu, Ryozo ; Akbar, Asneil ; Takigawa, Yukio ; Miyajima, Motoshu ; Kataoka, Yuji
Author_Institution :
Fujitsu Labs. Ltd., Atsugi
Abstract :
We have developed a new type of QCM sensor for real-time detection of chemical contaminant emission in SMIF pods. Because there is no need to modify SMIF pods when applying this sensor, introducing the QCM system to fabrication lines is very easy.
Keywords :
chemical sensors; chemical variables measurement; microbalances; quartz; QCM sensor; SMIF pods; chemical contaminant emission; quartz crystal microbalance sensor; real-time AMC detection; Chemical processes; Coaxial cables; Contamination; Equations; Fabrication; Laboratories; Resonance; Resonant frequency; Sampling methods; Sensor systems;
Conference_Titel :
Semiconductor Manufacturing, 2006. ISSM 2006. IEEE International Symposium on
Conference_Location :
Tokyo
Print_ISBN :
978-4-9904138-0-4
DOI :
10.1109/ISSM.2006.4493125
