Thin-Gate CMOS and Super-Thick Gate DECMOS Integration in 0° On-axis ≪100≫ Starting Wafer: Process Challenges and Solutions

In this paper, we report detailed studies on process challenges and solutions when super-thick gate DECMOS and thin gate CMOS are integrated together in 0deg on-axis <100> substrate. It has been found that large intra-wafer VT variation (sigma ~ 90 mV) and inter-wafer VT offset (~150 mV) are caused by single (f high energy WELL implant and front and back wafer surface swapping. A high energy implant method has been found very effective in reducing the VT variation to a ~30 mV. Low gate oxide breakdown at the thin gate active region edge has been solved by adding super-thick gate oxide buffer region between thin gate oxide and field oxide. Proper integration sequence has been used to minimize dopant ashout.