Title :
IEEE recommended practice for powering and grounding electronic equipment. (Color Book Series - Emerald Book)
Author :
Ribas, Renato P. ; Behrens, Frank H.
Author_Institution :
Inst. de Inf, PUC Campinas, Sao Paulo, Brazil
Abstract :
The increasing interest in microsystems technology or MEMS (Micro-Electro-Mechanical Systems) is a result of the progress in the integrated circuit (IC) fabrication domain, in the last decades. Nowadays, a great effort is being made to construct non-electrical parts on a single chip in order to obtain monolithic multi-functional smart sensors. For this, the CAD tools must also support such a multi-domain design environment, including from system behavior description and simulation to a unified layout construction. An approach to microsystems codesign is presented, and some back-end tools (layout level) such as layout generators, cross-section and 3D viewers, and etching simulators are already available
Keywords :
digital simulation; etching; hardware-software codesign; intelligent sensors; micromechanical devices; microsensors; 3D viewers; CAD tools; MEMS; cross-section viewers; etching simulators; layout generators; micro-electro-mechanical systems; microsystems codesign; monolithic multifunctional smart sensors; multi-domain design environment; simulation; system behavior description; unified layout construction; Books; Design automation; Electronic equipment; Fabrication; Grounding; Integrated circuit technology; Intelligent sensors; Microelectromechanical systems; Micromechanical devices; Power systems;
Conference_Titel :
Integrated Circuits and Systems Design, 1999. Proceedings. XII Symposium on
Conference_Location :
Natal
Print_ISBN :
0-7695-0387-X
DOI :
10.1109/SBCCI.1999.802965
