Title :
Monte Carlo Simulation of Active Gas Particles Diffusion in Deep Pores
Author :
Zinchenko, Constantin Yu ; Shwartz, Nataliya L. ; Yanovitskaja, Zoya Sh ; Zverev, Alexey V.
Author_Institution :
Novosibirsk State Tech. Univ., Novosibirsk
fDate :
June 1 2007-July 5 2007
Abstract :
Monte Carlo simulation of adsorption and diffusion of active gas particles in porous materials was carried out. Dependences of intensity of chemical reactions between particles on pores walls and penetration depth on pore size, adhesion coefficient and flux were analyzed.
Keywords :
Monte Carlo methods; adhesion; adsorption; diffusion; porous materials; substrates; Monte Carlo simulation; active gas particles; adhesion coefficient; adsorption; deep pores; diffusion; low-k materials; porous materials; porous substrate materials; Adhesives; Atomic layer deposition; Capacitance; Chemical analysis; Chemical vapor deposition; Dielectric materials; Helium; Monte Carlo methods; Nanoporous materials; Substrates; Monte Carlo; porous dielectrics; simulation;
Conference_Titel :
Electron Devices and Materials, 2007. EDM '07. 8th Siberian Russian Workshop and Tutorial on
Conference_Location :
Erlagol, Altai
Print_ISBN :
978-5-7782-0752-3
DOI :
10.1109/SIBEDM.2007.4292901
